Development of NSTAP: Nanoscale thermal anemometry probe

Gary J. Kunkel, Craig B. Arnold, Alexander J. Smits

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

A nanoscale thermal anemometry probe (NSTAP) has been developed to measure instantaneous fluid velocity at ultra-small scales. The sensing length of the current probe (∼80 μm) is and order of magnitude smaller than presently available commercial hot-wire anemometer probes (TSI Inc, Dantec Inc). The sensing element is a freestanding nanowire 100 nm × 1μm × 60 μm. suspended between two current-carrying contacts. The probe is constructed using standard semiconductor and microelectromechanical systems manufacturing methods. The increased surface area to volume ratio of the metallic nanowire in comparison to conventional probes yields a device that not only has a higher spatial resolution but is also more sensitive and rapid in its response to changing flows.

Original languageEnglish (US)
Title of host publicationCollection of Technical Papers - 36th AIAA Fluid Dynamics Conference
PublisherAmerican Institute of Aeronautics and Astronautics Inc.
Pages1938-1945
Number of pages8
ISBN (Print)1563478102, 9781563478109
DOIs
StatePublished - 2006
Event36th AIAA Fluid Dynamics Confernce - San Francisco, CA, United States
Duration: Jun 5 2006Jun 8 2006

Publication series

NameCollection of Technical Papers - 36th AIAA Fluid Dynamics Conference
Volume3

Other

Other36th AIAA Fluid Dynamics Confernce
CountryUnited States
CitySan Francisco, CA
Period6/5/066/8/06

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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