Depth and surface roughness control on laser micromachined polyimide for direct-write deposition

B. Pratap, C. B. Arnold, A. Piqué

Research output: Contribution to journalConference article

11 Scopus citations

Abstract

We are examining surface characteristics of ultraviolet pulsed-laser micromachined structures in polyimide as a function of the incident laser energy and the distance between subsequent laser spots in order to prepare surfaces for laser direct-write deposition of metals. Variations in the spot-to-spot translation distance provide an alternative means of average depth and roughness control when compared to fluence changes and focal distance variations. We find that the average depth is proportional to the inverse of the translation distance, while the root mean square surface roughness reaches a minimum when the translation distance is approximately equal to the full width half maximum of a single ablation mark on the surface. Conductive silver metal lines are deposited on the surface machined features demonstrating the ability to produce conductors with good adhesion over stepped structures on polyimide.

Original languageEnglish (US)
Pages (from-to)217-225
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4979
DOIs
StatePublished - Aug 25 2003
Externally publishedYes
EventMicromachining and Microfarication Process Technology VIII - San Jose, CA, United States
Duration: Jan 27 2003Jan 29 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Laser forward transfer
  • Polyimide
  • Pulsed laser micromachining

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