Demonstration of an isolated buried channel field-effect transistor fabricated via in situ patterned electron-beam deposition of Si in GaAs

  • A. P. Mills
  • , M. Hong
  • , J. P. Mannaerts
  • , L. N. Pfeiffer
  • , K. W. West
  • , S. Martin
  • , R. R. Ruel
  • , K. W. Baldwin
  • , J. E. Rowe

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