Abstract
In this work, the phase velocities of coplanar strip (CPS) transmission lines on Si/SiO2/Si multilayer substrates have been studied. Because the top Si layer of the substrate is very thin, the phase velocity measured is found to be close to that in ICs.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 452-453 |
| Number of pages | 2 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| State | Published - 1996 |
| Externally published | Yes |
| Event | Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA Duration: Jun 2 1996 → Jun 7 1996 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
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