Delay time in coplanar strip transmission lines on Si/SiO2/Si multilayer substrates

Erli Chen, Stephen Y. Chou

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

In this work, the phase velocities of coplanar strip (CPS) transmission lines on Si/SiO2/Si multilayer substrates have been studied. Because the top Si layer of the substrate is very thin, the phase velocity measured is found to be close to that in ICs.

Original languageEnglish (US)
Pages (from-to)452-453
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - Jan 1 1996
Externally publishedYes
EventProceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA
Duration: Jun 2 1996Jun 7 1996

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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