Abstract
In this work, the phase velocities of coplanar strip (CPS) transmission lines on Si/SiO2/Si multilayer substrates have been studied. Because the top Si layer of the substrate is very thin, the phase velocity measured is found to be close to that in ICs.
Original language | English (US) |
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Pages (from-to) | 452-453 |
Number of pages | 2 |
Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
State | Published - 1996 |
Externally published | Yes |
Event | Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA Duration: Jun 2 1996 → Jun 7 1996 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering