Abstract
In situ scanning electron microscopy micro-tensile tests were conducted on freestanding LIGA nickel thin films of two thicknesses (70 and 270 μm). The deformation and fracture mechanisms were elucidated by in situ scanning electron microscopy imaging and ex situ fractographic analysis. Due to the film microstructural gradient, an apparent thickness effect on the film yield strengths was observed, which was then rationalized with a continuum micromechanics model.
Original language | English (US) |
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Pages (from-to) | 1062-1065 |
Number of pages | 4 |
Journal | Scripta Materialia |
Volume | 58 |
Issue number | 12 |
DOIs | |
State | Published - Jun 2008 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys
Keywords
- LIGA
- Micromechanical modeling
- Nickel
- Tension test
- Thin films