Abstract
An atmospheric pressure ejected plasma source has been developed and applied to the decontamination of cobalt-contained oxide layer on metal surfaces. A helium-based discharge with relatively low gas temperature of approximately 200∼300 °C has been used for the decontamination. Small amounts of CF4 and O2 gases are added into helium plasmas as reactive species for carbonylation and fluorination of cobalt. Treatments are performed with various operating parameters such as RF power, treatment time and CF4/O2 gas flow ratio and so on. Decontamination ratios of approximately 95% have been achieved through both gasification and solidification. With the increased reactive gases, the decontamination processes are expedited via gasification, and decontamination ratios solely by gasification have reached up to approximately 70%, indicating the necessity of extra effort of removing solidified powder components.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 317-320 |
| Number of pages | 4 |
| Journal | Surface and Coatings Technology |
| Volume | 171 |
| Issue number | 1-3 |
| DOIs | |
| State | Published - Jul 1 2003 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- General Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Keywords
- Atmospheric pressure plasma
- Cobalt
- Decontamination