C₄F₈ dissociation in an inductively coupled plasma

A proposed cross section for c-C₄F₈ total dissociation was tested in dilute c-C₄F₈/Ar plasma. A Langmuir probe was used to make EEDF measurements and the total dissociation rate coefficient was calculated by integrating the total dissociation cross section over the measured EEPFs. The total dissociation rate coefficient was independently calculated using a reactor mass balance and measured c-C₄F₈ density. Comparison between the rate coefficients calculated by the two methods indicates that the proposed cross sections were accurate within model and experimental uncertainties.