Crystal-direction dependence of uniaxial tensile strain in ultra-thin SOI

Engineering

• Anisotropic 50%
• Crystal Orientation 50%
• Elastic Constant 50%
• Film Silicon 50%
• Tensile Strain 100%

Material Science

• Crystal Orientation 33%
• Elastic Constant 33%
• Film 33%
• Silicon 100%
• Tensile Strain 100%

Keyphrases

• SOI Structure 33%
• Ultra-thin SOI 100%