Abstract
Here, we describe a scalable fabrication method for single crystal diamond membrane windows that achieves three major goals with one fabrication method: providing high quality diamond, as confirmed by Raman spectroscopy; achieving homogeneously thin membranes, enabled by ion implantation; and providing compatibility with established planar fabrication via lithography and vertical etching. The membranes serve as the substrate for the fabrication of integrated diamond photonic technologies.
| Original language | English (US) |
|---|---|
| Article number | 89 |
| Pages (from-to) | 19-20 |
| Number of pages | 2 |
| Journal | Optics InfoBase Conference Papers |
| State | Published - 2019 |
| Externally published | Yes |
| Event | Diamond Photonics - Physics, Technologies and Applications, DP 2019 - Lausanne, Switzerland Duration: May 19 2019 → May 22 2019 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
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