Contact printing with nanometer resolution

Y. L. Loo, R. L. Willett, K. W. Baldwin, J. A. Rogers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Developed a purely additive contact printing technique that can, in a single step, form complex patterns of functional materials with nanometer resolution. This method can print directly nanostructures without the use of sacrificial resists, etching procedures or post-patterning deposition steps that are often required with other nanolithographic techniques. It is operationally simple, compatible with a wide range of materials (metals, dielectrics, etc.) and substrates (rigid inorganics, flexible plastics, etc.) and capable of patterning large areas under ambient conditions. The method, which we refer to as nanotransfer printing (nTP), involves the controlled transfer of material from the raised regions of reusable stamps onto the surfaces of substrates. Pattern transfer is driven by interfacial chemical and physical reactions that are initiated when the substrate and the stamp are brought into contact. We demonstrate the versatility of nTP by printing nanometer and micron scale metal patterns in the geometries of 2D photonic waveguides and electrostatic lenses and by building two functional devices on flexible substrates: high performance organic thin film transistors (TFTs) and thin film inorganic metal-insulator-metal (MIM) capacitors.

Original languageEnglish (US)
Title of host publication60th Device Research Conference, DRC 2002
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages149-150
Number of pages2
ISBN (Electronic)0780373170
DOIs
StatePublished - Jan 1 2002
Externally publishedYes
Event60th Device Research Conference, DRC 2002 - Santa Barbara, United States
Duration: Jun 24 2002Jun 26 2002

Publication series

NameDevice Research Conference - Conference Digest, DRC
Volume2002-January
ISSN (Print)1548-3770

Other

Other60th Device Research Conference, DRC 2002
CountryUnited States
CitySanta Barbara
Period6/24/026/26/02

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Keywords

  • Additives
  • Dielectric materials
  • Dielectric substrates
  • Etching
  • Metal-insulator structures
  • Nanostructured materials
  • Nanostructures
  • Organic thin film transistors
  • Printing
  • Resists

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  • Cite this

    Loo, Y. L., Willett, R. L., Baldwin, K. W., & Rogers, J. A. (2002). Contact printing with nanometer resolution. In 60th Device Research Conference, DRC 2002 (pp. 149-150). [1029566] (Device Research Conference - Conference Digest, DRC; Vol. 2002-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2002.1029566