Computer applications in plasma materials processing

David B. Graves; Richard A. Gottscho

doi:10.1557/S0883769400057602

Computer applications in plasma materials processing

David B. Graves
, Richard A. Gottscho

Chemical & Biological Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Original language	English (US)
Pages (from-to)	16-22
Number of pages	7
Journal	MRS Bulletin
Volume	16
Issue number	2
DOIs	https://doi.org/10.1557/S0883769400057602
State	Published - Feb 1991

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Physical and Theoretical Chemistry

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10.1557/S0883769400057602

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@article{147b94e39f12484e8133ccd503d26b12,

title = "Computer applications in plasma materials processing",

author = "Graves, \{David B.\} and Gottscho, \{Richard A.\}",

year = "1991",

month = feb,

doi = "10.1557/S0883769400057602",

language = "English (US)",

volume = "16",

pages = "16--22",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Springer Nature",

number = "2",

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T1 - Computer applications in plasma materials processing

AU - Graves, David B.

AU - Gottscho, Richard A.

PY - 1991/2

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UR - https://www.scopus.com/pages/publications/84976103279#tab=citedBy

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M3 - Article

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VL - 16

SP - 16

EP - 22

JO - MRS Bulletin

JF - MRS Bulletin

IS - 2

ER -

Computer applications in plasma materials processing

All Science Journal Classification (ASJC) codes

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