Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes

Chih kuan Tung; Robert Riehn; Robert H. Austin

doi:10.1063/1.3212074

Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes

Chih kuan Tung, Robert Riehn, Robert H. Austin

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Nanochannels offer a way to align and analyze long biopolymer molecules such as DNA with high precision at potentially single basepair resolution, especially if a means to detect biomolecules in nanochannels electronically can be developed. Integration of nanochannels with electronics will require the development of nanochannel fabrication procedures that will not damage sensitive electronics previously constructed on the device. We present here a near-room-temperature fabrication technology involving parylene-C conformal deposition that is compatible with complementary metal oxide semiconductor electronic devices and present an analysis of the initial impedance measurements of conformally parylene-C coated nanochannels with integrated gold nanoelectrodes.

Original language	English (US)
Article number	004903BMF
Journal	Biomicrofluidics
Volume	3
Issue number	3
DOIs	https://doi.org/10.1063/1.3212074
State	Published - 2009

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Fluid Flow and Transfer Processes
Biomedical Engineering
General Materials Science
Colloid and Surface Chemistry

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10.1063/1.3212074

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title = "Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes",

abstract = "Nanochannels offer a way to align and analyze long biopolymer molecules such as DNA with high precision at potentially single basepair resolution, especially if a means to detect biomolecules in nanochannels electronically can be developed. Integration of nanochannels with electronics will require the development of nanochannel fabrication procedures that will not damage sensitive electronics previously constructed on the device. We present here a near-room-temperature fabrication technology involving parylene-C conformal deposition that is compatible with complementary metal oxide semiconductor electronic devices and present an analysis of the initial impedance measurements of conformally parylene-C coated nanochannels with integrated gold nanoelectrodes.",

author = "Tung, {Chih kuan} and Robert Riehn and Austin, {Robert H.}",

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year = "2009",

doi = "10.1063/1.3212074",

language = "English (US)",

volume = "3",

journal = "Biomicrofluidics",

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AU - Tung, Chih kuan

AU - Riehn, Robert

AU - Austin, Robert H.

N1 - Funding Information: **NNMMRR ssppeeccttrraass wweerree oobbttaaiinneedd oonn aa BBrruukkeerr AAMM --660000 NNMMRR ssppeeccttrroommeetteerr CCHH --11 rreessoonnaannccee ffrreeqquueennccyy ooff 660000 MMhhzz. . AAllll wwoorrkk wwaass ddoonnee bbyy tthhee CCoolloorraaddoo SSttaattee Regional NMR Center, funded by NNaattiioonnaall SScciieennccee FFoouunnddaattiioonn GGrraanntt NNoo.. CHCHEE --88881166443377.. Funding Information: The authors are very grateful to and wish to acknowledge the generous assistance of the Colorado State Regional NMR Center at Fort Collins, Colorado working under the auspices of the National Science Foundation Funding Grant No. CHE-8616437. Also to Dr. Steve Dec at the Regional NMR Center who measured and interpreted the spectra and also to Dr. Joel Gray of the Adolph Coors Company, NMR Laboratory, Golden, Colorado for helpful technical liaisons between us and the Regional Center.

PY - 2009

Y1 - 2009

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AB - Nanochannels offer a way to align and analyze long biopolymer molecules such as DNA with high precision at potentially single basepair resolution, especially if a means to detect biomolecules in nanochannels electronically can be developed. Integration of nanochannels with electronics will require the development of nanochannel fabrication procedures that will not damage sensitive electronics previously constructed on the device. We present here a near-room-temperature fabrication technology involving parylene-C conformal deposition that is compatible with complementary metal oxide semiconductor electronic devices and present an analysis of the initial impedance measurements of conformally parylene-C coated nanochannels with integrated gold nanoelectrodes.

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Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes

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