Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes

Chih kuan Tung, Robert Riehn, Robert H. Austin

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

Nanochannels offer a way to align and analyze long biopolymer molecules such as DNA with high precision at potentially single basepair resolution, especially if a means to detect biomolecules in nanochannels electronically can be developed. Integration of nanochannels with electronics will require the development of nanochannel fabrication procedures that will not damage sensitive electronics previously constructed on the device. We present here a near-room-temperature fabrication technology involving parylene-C conformal deposition that is compatible with complementary metal oxide semiconductor electronic devices and present an analysis of the initial impedance measurements of conformally parylene-C coated nanochannels with integrated gold nanoelectrodes.

Original languageEnglish (US)
Article number004903BMF
JournalBiomicrofluidics
Volume3
Issue number3
DOIs
StatePublished - 2009

All Science Journal Classification (ASJC) codes

  • Molecular Biology
  • Materials Science(all)
  • Genetics
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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