Comparison between a two-dimensional simulation and a global conservation model for a compact ECR plasma source

Keyphrases

• Two-dimensional Simulation 100%
• Plasma Sources 100%
• Global Conservation 100%
• Conservation Model 100%
• Electron Cyclotron Resonance Plasma 100%
• Global Model 66%
• Electron Temperature 33%
• Model Prediction 33%
• Plasma Uniformity 33%
• Input Power 33%
• Plasma Density 33%
• Energy Conservation 33%
• Plasma Potential 33%
• Plasma Transport 33%
• Plasma Physics 33%
• Conservation Principles 33%
• Spatial Profile 33%
• Potential Temperature 33%
• Profile Information 33%
• Argon Gas 33%
• Electron Cyclotron Resonance Source 33%
• Scaling Law 33%
• Plasma Behavior 33%
• Power Loses 33%

Physics

• Electron Cyclotron Resonance 100%
• Electron Energy 50%
• Plasma Potential 50%
• Potential Temperature 50%
• Plasma Density 50%
• Transportation 50%