Comparison between a two-dimensional simulation and a global conservation model for a compact ECR plasma source

We compare results from a two-dimensional simulation of plasma transport in a compact electron cyclotron resonance (ECR) source with predictions from a spatially averaged global model based on particle and energy conservation. Model predictions include plasma density, plasma potential and electron temperature. In addition, the models predict the fraction of input power lost to various processes in the plasma. The models agree to within about 10% over the conditions examined: 0.5-10 mTorr and 850-1500 W in a model argon gas. The global model can be used to establish scaling laws, and it also provides insight into the overall plasma behaviour in terms of general conservation principles. The two-dimensional simulation is essential when spatial profile information is crucial, such as for predictions of plasma uniformity.