Comparative S/TEM Study of Superconducting Ta Quantum Resonators by Wet and Dry Etching Types

Junsik Mun; Chenyu Zhou; Nana Shumiya; Kim Kisslinger; Rebecca B. Cummings; Nathalie P. de Leon; Mingzhao Liu; Yimei Zhu

doi:10.1093/mam/ozae044.554

Comparative S/TEM Study of Superconducting Ta Quantum Resonators by Wet and Dry Etching Types

Junsik Mun, Chenyu Zhou, Nana Shumiya, Kim Kisslinger, Rebecca B. Cummings, Nathalie P. de Leon, Mingzhao Liu, Yimei Zhu

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	1114-1115
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	30
Issue number	2024
DOIs	https://doi.org/10.1093/mam/ozae044.554
State	Published - Jul 24 2024
Externally published	Yes
Event	82nd Annual Meeting Microscopy Society of America and the 58th Annual Meeting Microanalysis Society, M and M 2024 - Cleveland, United States Duration: Jul 28 2024 → Aug 1 2024

All Science Journal Classification (ASJC) codes

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10.1093/mam/ozae044.554

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title = "Comparative S/TEM Study of Superconducting Ta Quantum Resonators by Wet and Dry Etching Types",

author = "Junsik Mun and Chenyu Zhou and Nana Shumiya and Kim Kisslinger and Cummings, {Rebecca B.} and {de Leon}, {Nathalie P.} and Mingzhao Liu and Yimei Zhu",

year = "2024",

month = jul,

day = "24",

doi = "10.1093/mam/ozae044.554",

language = "English (US)",

volume = "30",

pages = "1114--1115",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "2024",

note = "82nd Annual Meeting Microscopy Society of America and the 58th Annual Meeting Microanalysis Society, M and M 2024 ; Conference date: 28-07-2024 Through 01-08-2024",

}

TY - JOUR

T1 - Comparative S/TEM Study of Superconducting Ta Quantum Resonators by Wet and Dry Etching Types

AU - Mun, Junsik

AU - Zhou, Chenyu

AU - Shumiya, Nana

AU - Kisslinger, Kim

AU - Cummings, Rebecca B.

AU - de Leon, Nathalie P.

AU - Liu, Mingzhao

AU - Zhu, Yimei

PY - 2024/7/24

Y1 - 2024/7/24

UR - http://www.scopus.com/inward/record.url?scp=85215701784&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85215701784&partnerID=8YFLogxK

U2 - 10.1093/mam/ozae044.554

DO - 10.1093/mam/ozae044.554

M3 - Conference article

AN - SCOPUS:85215701784

SN - 1431-9276

VL - 30

SP - 1114

EP - 1115

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - 2024

T2 - 82nd Annual Meeting Microscopy Society of America and the 58th Annual Meeting Microanalysis Society, M and M 2024

Y2 - 28 July 2024 through 1 August 2024

ER -

Comparative S/TEM Study of Superconducting Ta Quantum Resonators by Wet and Dry Etching Types

All Science Journal Classification (ASJC) codes

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