Comment on "fabrication of strained silicon on insulator by strain transfer process" [Appl. Phys. Lett. 87, 051921 (2005)]

R. L. Peterson; K. D. Hobart; F. J. Kub; J. C. Sturm

doi:10.1063/1.2192641

Comment on "fabrication of strained silicon on insulator by strain transfer process" [Appl. Phys. Lett. 87, 051921 (2005)]

R. L. Peterson, K. D. Hobart, F. J. Kub, J. C. Sturm

Research output: Contribution to journal › Comment/debate › peer-review

Original language	English (US)
Article number	146101
Journal	Applied Physics Letters
Volume	88
Issue number	14
DOIs	https://doi.org/10.1063/1.2192641
State	Published - Apr 3 2006

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2192641

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Comment on "fabrication of strained silicon on insulator by strain transfer process" [Appl. Phys. Lett. 87, 051921 (2005)]

All Science Journal Classification (ASJC) codes

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