Characterization of C 70 doped poly(styrene) -b- Poly(hexyl methacrylate) (PS-PHMA) thin film on c-Si substrate with a Jobin Yvon UVISEL, phase modulated spectroscopic ellipsometer (PMSE)

Alan R. Kramer; Nan Yao; Vincent Pelletier

doi:10.1117/12.559705

Characterization of C ₇₀ doped poly(styrene) -b- Poly(hexyl methacrylate) (PS-PHMA) thin film on c-Si substrate with a Jobin Yvon UVISEL, phase modulated spectroscopic ellipsometer (PMSE)

Alan R. Kramer, Nan Yao, Vincent Pelletier

Princeton Materials Institute

Research output: Contribution to journal › Conference article › peer-review

Abstract

Spectroscopic ellipsometry ¹ is commonly used for the optical characterization of solid state thin films and bulk substrates. In recent years, it has also gained widespread use in characterizing organic films ². The discovery of carbon nano-tubes has increased the utility of organic films by allowing the engineer to alter the electrical and mechanical properties of the material by doping the film with these graphite structures. Proper understanding through PMSE characterization of the structure is necessary to control desired optical and electrical properties. In this work we present mothodes of PMSE as an advantageous, non-destructive optical tool for the study of C ₇₀ doped PS-PHMA thin film on a c-Si(100) wafer. For the samples measured, concentration of C ₇₀ is reported along with dispersion relations for PS-PHMA films in the UV-Vis spectrum for untreated, heated and shear aligned films. There is also evidence that the C ₇₀ may also align within the micro-domain of the PS-PHMA producing an anisotropic film.

Original language	English (US)
Article number	15
Pages (from-to)	116-123
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5527
DOIs	https://doi.org/10.1117/12.559705
State	Published - 2004
Event	Advances in Thin Film Coatings for Optical Applications - Denver, CO, United States Duration: Aug 4 2004 → Aug 5 2004

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.559705

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Kramer, A. R., Yao, N., & Pelletier, V. (2004). Characterization of C ₇₀ doped poly(styrene) -b- Poly(hexyl methacrylate) (PS-PHMA) thin film on c-Si substrate with a Jobin Yvon UVISEL, phase modulated spectroscopic ellipsometer (PMSE). Proceedings of SPIE - The International Society for Optical Engineering, 5527, 116-123. Article 15. https://doi.org/10.1117/12.559705

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title = "Characterization of C 70 doped poly(styrene) -b- Poly(hexyl methacrylate) (PS-PHMA) thin film on c-Si substrate with a Jobin Yvon UVISEL, phase modulated spectroscopic ellipsometer (PMSE)",

abstract = "Spectroscopic ellipsometry 1 is commonly used for the optical characterization of solid state thin films and bulk substrates. In recent years, it has also gained widespread use in characterizing organic films 2. The discovery of carbon nano-tubes has increased the utility of organic films by allowing the engineer to alter the electrical and mechanical properties of the material by doping the film with these graphite structures. Proper understanding through PMSE characterization of the structure is necessary to control desired optical and electrical properties. In this work we present mothodes of PMSE as an advantageous, non-destructive optical tool for the study of C 70 doped PS-PHMA thin film on a c-Si(100) wafer. For the samples measured, concentration of C 70 is reported along with dispersion relations for PS-PHMA films in the UV-Vis spectrum for untreated, heated and shear aligned films. There is also evidence that the C 70 may also align within the micro-domain of the PS-PHMA producing an anisotropic film.",

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Characterization of C ₇₀ doped poly(styrene) -b- Poly(hexyl methacrylate) (PS-PHMA) thin film on c-Si substrate with a Jobin Yvon UVISEL, phase modulated spectroscopic ellipsometer (PMSE). / Kramer, Alan R.; Yao, Nan; Pelletier, Vincent.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5527, 15, 2004, p. 116-123.

Research output: Contribution to journal › Conference article › peer-review

TY - JOUR

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Characterization of C ₇₀ doped poly(styrene) -b- Poly(hexyl methacrylate) (PS-PHMA) thin film on c-Si substrate with a Jobin Yvon UVISEL, phase modulated spectroscopic ellipsometer (PMSE)

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