Characterisations of atmospheric pressure ejected plasma sources

Yong Hwan Kim; Yoon Ho Choi; Ji Hun Kim; Jong Kyu Park; Won Tae Ju; Kwang Hyun Paek; Yong Seok Hwang

doi:10.1016/S0257-8972(03)00412-2

Characterisations of atmospheric pressure ejected plasma sources

Yong Hwan Kim
, Yoon Ho Choi
, Ji Hun Kim
, Jong Kyu Park
, Won Tae Ju
, Kwang Hyun Paek
, Yong Seok Hwang

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Atmospheric pressure ejected plasma sources have been developed for processing arbitrary shaped objects. Plasma sources with two coaxial electrodes are characterised experimentally by varying source design parameters such as discharge volume and discharge gap distance under various operating conditions such as RF power, gas flow rate, and gas compositions. Using optical emission spectroscopy (OES), gas temperatures and radical densities are qualitatively evaluated for flexible applications of the source. Discharge characteristics as glow has been confirmed with voltage and current (V-I) probes. Based on these source characteristics, specific design rules are presented for various applications such as polymer surface modification and metal surface decontamination.

Original language	English (US)
Pages (from-to)	535-540
Number of pages	6
Journal	Surface and Coatings Technology
Volume	174-175
DOIs	https://doi.org/10.1016/S0257-8972(03)00412-2
State	Published - 2003
Externally published	Yes

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Keywords

Atmospheric pressure ejected plasma
Gas temperature
OES
Radical density

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10.1016/S0257-8972(03)00412-2

Cite this

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title = "Characterisations of atmospheric pressure ejected plasma sources",

abstract = "Atmospheric pressure ejected plasma sources have been developed for processing arbitrary shaped objects. Plasma sources with two coaxial electrodes are characterised experimentally by varying source design parameters such as discharge volume and discharge gap distance under various operating conditions such as RF power, gas flow rate, and gas compositions. Using optical emission spectroscopy (OES), gas temperatures and radical densities are qualitatively evaluated for flexible applications of the source. Discharge characteristics as glow has been confirmed with voltage and current (V-I) probes. Based on these source characteristics, specific design rules are presented for various applications such as polymer surface modification and metal surface decontamination.",

keywords = "Atmospheric pressure ejected plasma, Gas temperature, OES, Radical density",

author = "Kim, \{Yong Hwan\} and Choi, \{Yoon Ho\} and Kim, \{Ji Hun\} and Park, \{Jong Kyu\} and Ju, \{Won Tae\} and Paek, \{Kwang Hyun\} and Hwang, \{Yong Seok\}",

year = "2003",

doi = "10.1016/S0257-8972(03)00412-2",

language = "English (US)",

volume = "174-175",

pages = "535--540",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Characterisations of atmospheric pressure ejected plasma sources

AU - Kim, Yong Hwan

AU - Choi, Yoon Ho

AU - Kim, Ji Hun

AU - Park, Jong Kyu

AU - Ju, Won Tae

AU - Paek, Kwang Hyun

AU - Hwang, Yong Seok

PY - 2003

Y1 - 2003

N2 - Atmospheric pressure ejected plasma sources have been developed for processing arbitrary shaped objects. Plasma sources with two coaxial electrodes are characterised experimentally by varying source design parameters such as discharge volume and discharge gap distance under various operating conditions such as RF power, gas flow rate, and gas compositions. Using optical emission spectroscopy (OES), gas temperatures and radical densities are qualitatively evaluated for flexible applications of the source. Discharge characteristics as glow has been confirmed with voltage and current (V-I) probes. Based on these source characteristics, specific design rules are presented for various applications such as polymer surface modification and metal surface decontamination.

AB - Atmospheric pressure ejected plasma sources have been developed for processing arbitrary shaped objects. Plasma sources with two coaxial electrodes are characterised experimentally by varying source design parameters such as discharge volume and discharge gap distance under various operating conditions such as RF power, gas flow rate, and gas compositions. Using optical emission spectroscopy (OES), gas temperatures and radical densities are qualitatively evaluated for flexible applications of the source. Discharge characteristics as glow has been confirmed with voltage and current (V-I) probes. Based on these source characteristics, specific design rules are presented for various applications such as polymer surface modification and metal surface decontamination.

KW - Atmospheric pressure ejected plasma

KW - Gas temperature

KW - OES

KW - Radical density

UR - https://www.scopus.com/pages/publications/18244418839

UR - https://www.scopus.com/pages/publications/18244418839#tab=citedBy

U2 - 10.1016/S0257-8972(03)00412-2

DO - 10.1016/S0257-8972(03)00412-2

M3 - Article

AN - SCOPUS:18244418839

SN - 0257-8972

VL - 174-175

SP - 535

EP - 540

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Characterisations of atmospheric pressure ejected plasma sources

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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