TY - GEN
T1 - CFD-aided design for polysilicon production system
AU - Cai, D.
AU - Zheng, L. L.
AU - Zhang, H.
AU - Wan, Y.
AU - Hariharan, A. V.
AU - Chandra, M.
PY - 2002
Y1 - 2002
N2 - This paper presents the CFD-aided design for polysilicon production system that utilizes an innovative technique of silicon tube - based CVD process. Virtual experiment has been conducted, which involves the development of a complex computational model capable of describing multi-component fluid flow, gas/surface chemistry, conjugate heat transfer, thermal radiation, and species transport. Theoretical analysis has been conducted and a desirable velocity regime for silane and hydrogen mixture has been found. The simulations of the flow field, temperature and species transport have been performed for various reactor geometries, operating conditions (e.g., flow rates of primary silane and secondary hydrogen gases), and heating power design. The deposition rate of polysilicon has been derived analytically as well as computationally. The effects of various conditions on deposition rate have been investigated, and optimal geometry and operating conditions have been obtained for the targeted deposition rate.
AB - This paper presents the CFD-aided design for polysilicon production system that utilizes an innovative technique of silicon tube - based CVD process. Virtual experiment has been conducted, which involves the development of a complex computational model capable of describing multi-component fluid flow, gas/surface chemistry, conjugate heat transfer, thermal radiation, and species transport. Theoretical analysis has been conducted and a desirable velocity regime for silane and hydrogen mixture has been found. The simulations of the flow field, temperature and species transport have been performed for various reactor geometries, operating conditions (e.g., flow rates of primary silane and secondary hydrogen gases), and heating power design. The deposition rate of polysilicon has been derived analytically as well as computationally. The effects of various conditions on deposition rate have been investigated, and optimal geometry and operating conditions have been obtained for the targeted deposition rate.
UR - https://www.scopus.com/pages/publications/78249284041
UR - https://www.scopus.com/pages/publications/78249284041#tab=citedBy
U2 - 10.1115/IMECE2002-33077
DO - 10.1115/IMECE2002-33077
M3 - Conference contribution
AN - SCOPUS:78249284041
SN - 0791836363
SN - 9780791836361
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 15
EP - 20
BT - Heat Transfer
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2002 International Mechanical Engineering Congress and Exposition, IMECE2002
Y2 - 17 November 2002 through 22 November 2002
ER -