Block copolymer nanolithography

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English (US)
Title of host publication	Nanolithography and Patterning Techniques in Microelectronics
Publisher	Elsevier Ltd
Pages	1-38
Number of pages	38
ISBN (Print)	9781855739314
DOIs	https://doi.org/10.1533/9781845690908.1
State	Published - Sep 2005

All Science Journal Classification (ASJC) codes

@inbook{b2212268474e4c108698e27306783287,

title = "Block copolymer nanolithography",

author = "M. Trawick and D. Angelescu and P. Chaikin and R. Register",

year = "2005",

month = sep,

doi = "10.1533/9781845690908.1",

language = "English (US)",

isbn = "9781855739314",

pages = "1--38",

booktitle = "Nanolithography and Patterning Techniques in Microelectronics",

publisher = "Elsevier Ltd",

}

TY - CHAP

T1 - Block copolymer nanolithography

AU - Trawick, M.

AU - Angelescu, D.

AU - Chaikin, P.

AU - Register, R.

PY - 2005/9

Y1 - 2005/9

UR - https://www.scopus.com/pages/publications/84902625347

UR - https://www.scopus.com/pages/publications/84902625347#tab=citedBy

U2 - 10.1533/9781845690908.1

DO - 10.1533/9781845690908.1

M3 - Chapter

AN - SCOPUS:84902625347

SN - 9781855739314

SP - 1

EP - 38

BT - Nanolithography and Patterning Techniques in Microelectronics

PB - Elsevier Ltd

ER -