Original language | English (US) |
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Title of host publication | Nanolithography and Patterning Techniques in Microelectronics |
Publisher | Elsevier Ltd |
Pages | 1-38 |
Number of pages | 38 |
ISBN (Print) | 9781855739314 |
DOIs | |
State | Published - Sep 2005 |
All Science Journal Classification (ASJC) codes
- Engineering(all)