Block copolymer nanolithography

M. Trawick, D. Angelescu, P. Chaikin, R. Register

Research output: Chapter in Book/Report/Conference proceedingChapter

10 Scopus citations
Original languageEnglish (US)
Title of host publicationNanolithography and Patterning Techniques in Microelectronics
PublisherElsevier Ltd
Pages1-38
Number of pages38
ISBN (Print)9781855739314
DOIs
StatePublished - Sep 2005

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'Block copolymer nanolithography'. Together they form a unique fingerprint.

Cite this