Block copolymer nanolithography

M. Trawick, D. Angelescu, P. Chaikin, R. Register

Research output: Chapter in Book/Report/Conference proceedingChapter

13 Scopus citations
Original languageEnglish (US)
Title of host publicationNanolithography and Patterning Techniques in Microelectronics
PublisherElsevier Ltd
Number of pages38
ISBN (Print)9781855739314
StatePublished - Sep 2005

All Science Journal Classification (ASJC) codes

  • General Engineering


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