Block copolymer lithography: Periodic arrays of ~1011 holes in 1 square centimeter

Miri Park, Christopher Harrison, Paul M. Chaikin, Richard A. Register, Douglas H. Adamson

Research output: Contribution to journalArticlepeer-review

1620 Scopus citations

Abstract

Dense periodic arrays of holes and dots have been fabricated in a silicon nitride-coated silicon wafer. The holes are 20 nanometers across, 40 nanometers apart, and hexagonally ordered with a polygrain structure that has an average grain size of 10 by 10. Spin-coated diblock copolymer thin films with well-ordered spherical or cylindrical microdomains were used as the templates. The microdomain patterns were transferred directly to the underlying silicon nitride layer by two complementary techniques that resulted in opposite tones of the patterns. This process opens a route for nanometer-scale surface patterning by means of spontaneous self-assembly in synthetic materials on length scales that are difficult to obtain by standard semiconductor lithography techniques.

Original languageEnglish (US)
Pages (from-to)1401-1404
Number of pages4
JournalScience
Volume276
Issue number5317
DOIs
StatePublished - May 30 1997

All Science Journal Classification (ASJC) codes

  • General

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