Behavior Of Ar Plasma Formed In A High Density Plasma Source–An ECR Reactor

Wu Han-Ming, D. B. Graves, R. K. Porteous, Li Ming

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Behavior Of Ar Plasma Formed In A High Density Plasma Source–An ECR Reactor'. Together they form a unique fingerprint.

Physics

Material Science

Keyphrases

Engineering