BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP.

Tim Stultz, Jim Sturm, James Gibbons

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
EditorsJaydish Narayan, Walter Lyons Brown, Ross A. Lemons
Pages463-476
Number of pages14
StatePublished - Dec 1 1983

Publication series

NameMaterials Research Society Symposia Proceedings
Volume13
ISSN (Print)0272-9172

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP.'. Together they form a unique fingerprint.

  • Cite this

    Stultz, T., Sturm, J., & Gibbons, J. (1983). BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP. In J. Narayan, W. L. Brown, & R. A. Lemons (Eds.), Materials Research Society Symposia Proceedings (pp. 463-476). (Materials Research Society Symposia Proceedings; Vol. 13).