BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP.

Tim Stultz; Jim Sturm; James Gibbons

BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP.

Tim Stultz, Jim Sturm, James Gibbons

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Editors	Jaydish Narayan, Walter Lyons Brown, Ross A. Lemons
Pages	463-476
Number of pages	14
State	Published - 1983

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	13
ISSN (Print)	0272-9172

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

@inproceedings{0879bb5d44fd41ad9a9f595e5b35b8ad,

title = "BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP.",

author = "Tim Stultz and Jim Sturm and James Gibbons",

year = "1983",

language = "English (US)",

isbn = "0444007881",

series = "Materials Research Society Symposia Proceedings",

pages = "463--476",

editor = "Jaydish Narayan and Brown, {Walter Lyons} and Lemons, {Ross A.}",

booktitle = "Materials Research Society Symposia Proceedings",

}

BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP. / Stultz, Tim; Sturm, Jim; Gibbons, James.
Materials Research Society Symposia Proceedings. ed. / Jaydish Narayan; Walter Lyons Brown; Ross A. Lemons. 1983. p. 463-476 (Materials Research Society Symposia Proceedings; Vol. 13).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP.

AU - Stultz, Tim

AU - Sturm, Jim

AU - Gibbons, James

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=0020915033&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020915033&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0020915033

SN - 0444007881

T3 - Materials Research Society Symposia Proceedings

SP - 463

EP - 476

BT - Materials Research Society Symposia Proceedings

A2 - Narayan, Jaydish

A2 - Brown, Walter Lyons

A2 - Lemons, Ross A.

ER -

BEAM PROCESSING OF SILICON WITH A SCANNING CW Hg LAMP.

Publication series

All Science Journal Classification (ASJC) codes

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Cite this