ATOMIC DIFFUSION IN SILICON.

Roberto Car, Paul J. Kelly, Atsushi Oshiyama, Sokrates T. Pantelides

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Unknown Host Publication Title
Publisher	Springer Verlag
Pages	713-720
Number of pages	8
ISBN (Print)	0387961089, 9780387961088
DOIs	https://doi.org/10.1007/978-1-4615-7682-2_159
State	Published - 1985
Externally published	Yes

All Science Journal Classification (ASJC) codes

@inproceedings{db3493eed93e49fd8e8be3ea2c40275e,

title = "ATOMIC DIFFUSION IN SILICON.",

author = "Roberto Car and Kelly, \{Paul J.\} and Atsushi Oshiyama and Pantelides, \{Sokrates T.\}",

year = "1985",

doi = "10.1007/978-1-4615-7682-2\_159",

language = "English (US)",

isbn = "0387961089",

publisher = "Springer Verlag",

pages = "713--720",

booktitle = "Unknown Host Publication Title",

address = "Germany",

}

TY - GEN

T1 - ATOMIC DIFFUSION IN SILICON.

AU - Car, Roberto

AU - Kelly, Paul J.

AU - Oshiyama, Atsushi

AU - Pantelides, Sokrates T.

PY - 1985

Y1 - 1985

UR - https://www.scopus.com/pages/publications/0022229406

UR - https://www.scopus.com/inward/citedby.url?scp=0022229406&partnerID=8YFLogxK

U2 - 10.1007/978-1-4615-7682-2_159

DO - 10.1007/978-1-4615-7682-2_159

M3 - Conference contribution

AN - SCOPUS:0022229406

SN - 0387961089

SN - 9780387961088

SP - 713

EP - 720

BT - Unknown Host Publication Title

PB - Springer Verlag

ER -