ATOMIC DIFFUSION IN SILICON.

Roberto Car, Paul J. Kelly, Atsushi Oshiyama, Sokrates T. Pantelides

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations
Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
PublisherSpringer Verlag
Pages713-720
Number of pages8
ISBN (Print)0387961089, 9780387961088
DOIs
StatePublished - Jan 1 1985
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'ATOMIC DIFFUSION IN SILICON.'. Together they form a unique fingerprint.

  • Cite this

    Car, R., Kelly, P. J., Oshiyama, A., & Pantelides, S. T. (1985). ATOMIC DIFFUSION IN SILICON. In Unknown Host Publication Title (pp. 713-720). Springer Verlag. https://doi.org/10.1007/978-1-4615-7682-2_159