ATOMIC DIFFUSION IN SILICON.

Roberto Car, Paul J. Kelly, Atsushi Oshiyama, Sokrates T. Pantelides

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations
Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
PublisherSpringer Verlag
Pages713-720
Number of pages8
ISBN (Print)0387961089, 9780387961088
DOIs
StatePublished - Jan 1 1985
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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