Fingerprint
Dive into the research topics of 'Argon and oxygen ion chemistry effects in photoresist etching'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Argon and oxygen ion chemistry effects in photoresist etching
Frank Greer, L. Van, D. Fraser, J. W. Coburn, David B. Graves
Research output: Contribution to journal › Article › peer-review
16
Scopus
citations