Applications of excimer laser in nanofabrication

Keyphrases

• Nanoparticle Arrays 50%
• Line Edge Roughness 50%
• Fabrication Defects 50%
• Molten Material 50%
• Shallow Trench 50%
• Si Waveguide 50%
• Metal Nanoparticle Arrays 50%
• Array of Channels 50%
• Selective Melting 50%
• Polymer Nanostructures 50%
• DNA Stretching 50%
• Cap Plates 50%

Engineering

• Surface Topography 100%
• Molten Material 100%
• Forming Surface 100%