Applications of excimer laser in nanofabrication

Engineering & Materials Science

• Excimer lasers 100%
• Liquefaction 76%
• Nanotechnology 74%
• Laser pulses 41%
• Nanostructures 39%
• Nanoimprint lithography 37%
• Metal nanoparticles 27%
• Nanofluidics 26%
• Fabrication 23%
• Fused silica 22%
• Lasers 18%
• Substrates 17%
• Nanoparticles 15%
• Monolayers 10%
• Metals 10%
• Surface topography 9%
• Molds 9%
• Stretching 8%
• DNA 8%
• Waveguides 8%
• Thermal effects 8%
• Molten materials 7%
• Melting 7%
• Seals 7%
• Aspect ratio 7%
• Oxidation 7%
• Wavelength 7%
• Surface roughness 6%
• Silicon 6%
• Boundary conditions 6%
• Plastics 5%
• Polymers 5%
• Defects 5%

Chemical Compounds

• Liquefaction 82%
• Excimer 70%
• Nanomaterial 20%
• Application 20%
• Metal Nanoparticle 16%
• Surface 10%
• Nanoparticle 8%
• Metal 7%
• Melting 6%
• Fragmentation 6%
• Monolayer 6%
• Heat 5%
• Wavelength 5%