Abstract
Amorphous silicon subwavelength gratings have been fabricated. Their use as quarter-wave plates in polarization switching vertical-cavity surface-emitting lasers with tunable oscillation frequency as high as several terahertz is proposed. The substantial increase in frequency comes from a reduction in the oscillator cavity length due to the small thickness of the grating (only about one-third of the wavelength thick). The frequency tuning is provided by fabricating the wave plate and a partial reflector monolithically on a movable microcantilever.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2864-2867 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 15 |
| Issue number | 6 |
| DOIs | |
| State | Published - 1997 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering