Application of amorphous silicon subwavelength gratings in polarization switching vertical-cavity surface-emitting lasers

Stephen Y. Chou, Steven J. Schablitsky, Lei Zhuang

Research output: Contribution to journalArticle

12 Scopus citations

Abstract

Amorphous silicon subwavelength gratings have been fabricated. Their use as quarter-wave plates in polarization switching vertical-cavity surface-emitting lasers with tunable oscillation frequency as high as several terahertz is proposed. The substantial increase in frequency comes from a reduction in the oscillator cavity length due to the small thickness of the grating (only about one-third of the wavelength thick). The frequency tuning is provided by fabricating the wave plate and a partial reflector monolithically on a movable microcantilever.

Original languageEnglish (US)
Pages (from-to)2864-2867
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number6
StatePublished - Nov 1 1997
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

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