Appearance potential mass spectrometry: discrimination of dissociative ionization products

Harmeet Singh, J. W. Coburn, David B. Graves

Research output: Contribution to journalArticlepeer-review

91 Scopus citations

Abstract

Appearance potential mass spectrometry (APMS) is a proven method characterize vacuum-based processes. This article details the procedure of calibrating the measured radical signal to calculate the radical absolute number density. It demonstrates that the traditional method of normalization of the radical signal with dissociative ionization signal from the parent leads to an overestimation of the radical number density due to discrimination against high kinetic energy ions produced in dissociative ionization.

Original languageEnglish (US)
Pages (from-to)299-305
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume18
Issue number2
DOIs
StatePublished - Mar 2000
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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