Appearance potential mass spectrometry: discrimination of dissociative ionization products

Harmeet Singh; J. W. Coburn; David B. Graves

doi:10.1116/1.582183

Appearance potential mass spectrometry: discrimination of dissociative ionization products

Harmeet Singh, J. W. Coburn, David B. Graves

Research output: Contribution to journal › Article › peer-review

92 Scopus citations

Abstract

Appearance potential mass spectrometry (APMS) is a proven method characterize vacuum-based processes. This article details the procedure of calibrating the measured radical signal to calculate the radical absolute number density. It demonstrates that the traditional method of normalization of the radical signal with dissociative ionization signal from the parent leads to an overestimation of the radical number density due to discrimination against high kinetic energy ions produced in dissociative ionization.

Original language	English (US)
Pages (from-to)	299-305
Number of pages	7
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	18
Issue number	2
DOIs	https://doi.org/10.1116/1.582183
State	Published - Mar 2000
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.582183

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abstract = "Appearance potential mass spectrometry (APMS) is a proven method characterize vacuum-based processes. This article details the procedure of calibrating the measured radical signal to calculate the radical absolute number density. It demonstrates that the traditional method of normalization of the radical signal with dissociative ionization signal from the parent leads to an overestimation of the radical number density due to discrimination against high kinetic energy ions produced in dissociative ionization.",

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Appearance potential mass spectrometry: discrimination of dissociative ionization products

Abstract

All Science Journal Classification (ASJC) codes

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