Abstract
Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic ( E × B ) fields are promising for low-damage (gentle) material processing. However, these plasmas can be subject to the formation of plasma non-uniformities propagating in the E × B direction. These rotating plasma structures (or “spokes”) enhance the transport of charged species across the magnetic field, which can harm the gentle processing capability of the plasma. In this work, we investigate the role of electrostatically active boundaries on the spoke formation by incorporating a variable bias conducting boundary (known as an anticathode) placed on the axially opposite side of the cathode. Our findings indicate azimuthal mode suppression occurs when the anticathode is electron collecting. Furthermore, we show selective azimuthal mode suppression by biasing the anticathode to an intermediate potential between the cathode and anode potentials. These findings suggest a link between the axial electron confinement in the e-beam generated plasma and azimuthally propagating plasma structure formation.
| Original language | English (US) |
|---|---|
| Article number | 064101 |
| Journal | Applied Physics Letters |
| Volume | 126 |
| Issue number | 6 |
| DOIs | |
| State | Published - Feb 10 2025 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)