Annealing of implantation damage and redistribution of impurities in SiC using a pulsed excimer laser

S. Y. Chou, Y. Chang, K. H. Weiner, T. W. Sigmon, J. D. Parsons

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Fingerprint

Dive into the research topics of 'Annealing of implantation damage and redistribution of impurities in SiC using a pulsed excimer laser'. Together they form a unique fingerprint.

Physics & Astronomy