TY - GEN
T1 - Anisotropic and nonhomogeneous thermal conduction in 1 μm thick CVD diamond
AU - Sood, Aditya
AU - Cho, Jungwan
AU - Hobart, Karl D.
AU - Feygelson, Tatyana
AU - Pate, Bradford
AU - Asheghi, Mehdi
AU - Goodson, Kenneth E.
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/9/4
Y1 - 2014/9/4
N2 - We present an experimental study of thermal conduction in 1 μm thick suspended CVD diamond film by time-domain thermoreflectance (TDTR), an optical pump-probe technique. Important aspects of signal analysis and measurement sensitivity are discussed, outlining the various thermal metrology challenges posed by this system. We measure the properties of the near-interfacial coalescence region and high-quality growth region by performing experiments on the bottom and top sides of the suspended film, respectively, and find that the small average grain size of the former, and strong columnar anisotropy of the latter region are reflected in the measurements of thermal conductivity. Our TDTR methodology utilizes the information present in both the amplitude and phase response of the system at the modulation harmonic of the pump laser, in order to separate out the effects of the transducer-diamond thermal boundary conductance from the intrinsic diamond conductivity. Additionally, measurements are made across a range of modulation frequencies in order to obtain better estimates of the conductivity anisotropy. For the 1 μm thick film, we estimate an in-plane to through-plane anisotropy ratio of 0.3, and through-plane conductivities of 440 W/m-K and 140 W/m-K for the high quality and coalescence regions, respectively.
AB - We present an experimental study of thermal conduction in 1 μm thick suspended CVD diamond film by time-domain thermoreflectance (TDTR), an optical pump-probe technique. Important aspects of signal analysis and measurement sensitivity are discussed, outlining the various thermal metrology challenges posed by this system. We measure the properties of the near-interfacial coalescence region and high-quality growth region by performing experiments on the bottom and top sides of the suspended film, respectively, and find that the small average grain size of the former, and strong columnar anisotropy of the latter region are reflected in the measurements of thermal conductivity. Our TDTR methodology utilizes the information present in both the amplitude and phase response of the system at the modulation harmonic of the pump laser, in order to separate out the effects of the transducer-diamond thermal boundary conductance from the intrinsic diamond conductivity. Additionally, measurements are made across a range of modulation frequencies in order to obtain better estimates of the conductivity anisotropy. For the 1 μm thick film, we estimate an in-plane to through-plane anisotropy ratio of 0.3, and through-plane conductivities of 440 W/m-K and 140 W/m-K for the high quality and coalescence regions, respectively.
KW - CVD diamond
KW - coalescence and growth
KW - columnar anisotropy
KW - heat spreaders
KW - thermal boundary resistance (TBR)
KW - time-domain thermoreflectance (TDTR)
UR - http://www.scopus.com/inward/record.url?scp=84907688627&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84907688627&partnerID=8YFLogxK
U2 - 10.1109/ITHERM.2014.6892415
DO - 10.1109/ITHERM.2014.6892415
M3 - Conference contribution
AN - SCOPUS:84907688627
T3 - Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference
SP - 1192
EP - 1198
BT - Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 14th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2014
Y2 - 27 May 2014 through 30 May 2014
ER -