@inproceedings{c109d1e81759413d8c33a719a1208c6d,
title = "Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond",
abstract = "A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology, employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.",
author = "Burek, \{Michael J.\} and Shields, \{Brendan J.\} and \{De Leon\}, Nathalie and Hausmann, \{Birgit M.\} and Yiwen Chu and Qimin Quan and Mikhail Lukin and Marko Lon{\v c}ar",
year = "2012",
language = "English (US)",
isbn = "9781467318396",
series = "2012 Conference on Lasers and Electro-Optics, CLEO 2012",
booktitle = "2012 Conference on Lasers and Electro-Optics, CLEO 2012",
note = "2012 Conference on Lasers and Electro-Optics, CLEO 2012 ; Conference date: 06-05-2012 Through 11-05-2012",
}