@inproceedings{3b960855845c4c00aab7d4fbf3cd9c72,
title = "Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond",
abstract = "A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology, employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.",
author = "Burek, {Michael J.} and Shields, {Brendan J.} and Leon, {Nathalie De} and Hausmann, {Birgit M.} and Yiwen Chu and Qimin Quan and Mikhail Lukin and Marko Lon{\v c}ar",
year = "2012",
language = "English (US)",
isbn = "9781557529435",
series = "CLEO: Science and Innovations, CLEO_SI 2012",
pages = "CM1M.2",
booktitle = "CLEO",
note = "CLEO: Science and Innovations, CLEO_SI 2012 ; Conference date: 06-05-2012 Through 11-05-2012",
}