Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond

Michael J. Burek, Brendan J. Shields, Nathalie De Leon, Birgit M. Hausmann, Yiwen Chu, Qimin Quan, Mikhail Lukin, Marko Lončar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology, employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.

Original languageEnglish (US)
Title of host publication2012 Conference on Lasers and Electro-Optics, CLEO 2012
StatePublished - Dec 6 2012
Externally publishedYes
Event2012 Conference on Lasers and Electro-Optics, CLEO 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012

Publication series

Name2012 Conference on Lasers and Electro-Optics, CLEO 2012

Other

Other2012 Conference on Lasers and Electro-Optics, CLEO 2012
CountryUnited States
CitySan Jose, CA
Period5/6/125/11/12

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Burek, M. J., Shields, B. J., De Leon, N., Hausmann, B. M., Chu, Y., Quan, Q., Lukin, M., & Lončar, M. (2012). Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond. In 2012 Conference on Lasers and Electro-Optics, CLEO 2012 [6325642] (2012 Conference on Lasers and Electro-Optics, CLEO 2012).