An ASIC for readout of post-processed thin-film MEMS resonators by employing capacitive interfacing and active parasitic cancellation

L. Huang, W. Rieutort-Louis, A. Gualdino, L. Teagno, Y. Hu, J. Mouro, J. Sanz-Robinson, J. C. Sturm, S. Wagner, V. Chu, J. P. Conde, N. Verma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

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Engineering & Materials Science

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