An ASIC for readout of post-processed thin-film MEMS resonators by employing capacitive interfacing and active parasitic cancellation

L. Huang, W. Rieutort-Louis, A. Gualdino, L. Teagno, Y. Hu, J. Mouro, J. Sanz-Robinson, J. C. Sturm, S. Wagner, V. Chu, J. P. Conde, N. Verma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Thin-film MEMS bridges as micro-resonators have proven attractive for various sensing applications (acceleration, mass, chemical, pressure, etc.) by using frequency shift as a basis for sensing [1]. Low-temperature processing of amorphous-silicon (a-Si:H) enables low-cost fabrication of high-Q MEMS bridges having excellent compatibility with CMOS post processing. However, the a-Si:H bridges have weak motional conductances [2]. Parasitic feed-through capacitances, both due to the device structure and routing, can easily drown out the resonant behavior. This paper proposes a non-contact MEMS interfacing and readout system in standard CMOS which enables robust integration while substantially rejecting the effects of parasitic feed-through capacitance.

Original languageEnglish (US)
Title of host publication2014 Symposium on VLSI Circuits, VLSIC 2014 - Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479933273
DOIs
StatePublished - Jan 1 2014
Event28th IEEE Symposium on VLSI Circuits, VLSIC 2014 - Honolulu, HI, United States
Duration: Jun 10 2014Jun 13 2014

Publication series

NameIEEE Symposium on VLSI Circuits, Digest of Technical Papers

Other

Other28th IEEE Symposium on VLSI Circuits, VLSIC 2014
CountryUnited States
CityHonolulu, HI
Period6/10/146/13/14

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Huang, L., Rieutort-Louis, W., Gualdino, A., Teagno, L., Hu, Y., Mouro, J., Sanz-Robinson, J., Sturm, J. C., Wagner, S., Chu, V., Conde, J. P., & Verma, N. (2014). An ASIC for readout of post-processed thin-film MEMS resonators by employing capacitive interfacing and active parasitic cancellation. In 2014 Symposium on VLSI Circuits, VLSIC 2014 - Digest of Technical Papers [6858442] (IEEE Symposium on VLSI Circuits, Digest of Technical Papers). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/VLSIC.2014.6858442