Fingerprint
Dive into the research topics of 'Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field
He Gao, Hua Tan, Wei Zhang, Keith Morton, Stephen Y. Chou
Research output: Contribution to journal › Article › peer-review
85
Scopus
citations