Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field

He Gao, Hua Tan, Wei Zhang, Keith Morton, Stephen Y. Chou

Research output: Contribution to journalArticlepeer-review

79 Scopus citations

Fingerprint

Dive into the research topics of 'Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science