Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

S. M. Duff; J. Austermann; J. A. Beall; D. Becker; R. Datta; P. A. Gallardo; S. W. Henderson; G. C. Hilton; S. P. Ho; J. Hubmayr; B. J. Koopman; D. Li; J. McMahon; F. Nati; M. D. Niemack; C. G. Pappas; M. Salatino; B. L. Schmitt; S. M. Simon; S. T. Staggs; J. R. Stevens; J. Van Lanen; E. M. Vavagiakis; J. T. Ward; E. J. Wollack

doi:10.1007/s10909-016-1576-y

Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

S. M. Duff, J. Austermann, J. A. Beall, D. Becker, R. Datta, P. A. Gallardo, S. W. Henderson, G. C. Hilton, S. P. Ho, J. Hubmayr, B. J. Koopman, D. Li, J. McMahon, F. Nati, M. D. Niemack, C. G. Pappas, M. Salatino, B. L. Schmitt, S. M. Simon, S. T. StaggsJ. R. Stevens, J. Van Lanen, E. M. Vavagiakis, J. T. Ward, E. J. Wollack

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

Abstract

Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiN_x) materials and microwave structures, and the resulting performance improvements.

Original language	English (US)
Pages (from-to)	634-641
Number of pages	8
Journal	Journal of Low Temperature Physics
Volume	184
Issue number	3-4
DOIs	https://doi.org/10.1007/s10909-016-1576-y
State	Published - Aug 1 2016

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
General Materials Science
Condensed Matter Physics

Keywords

AlMn
Multichroic
Polarimeter
SiN
Transition-edge sensor

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10.1007/s10909-016-1576-y

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Duff, S. M., Austermann, J., Beall, J. A., Becker, D., Datta, R., Gallardo, P. A., Henderson, S. W., Hilton, G. C., Ho, S. P., Hubmayr, J., Koopman, B. J., Li, D., McMahon, J., Nati, F., Niemack, M. D., Pappas, C. G., Salatino, M., Schmitt, B. L., Simon, S. M., ... Wollack, E. J. (2016). Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers. Journal of Low Temperature Physics, 184(3-4), 634-641. https://doi.org/10.1007/s10909-016-1576-y

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title = "Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers",

abstract = "Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiNx) materials and microwave structures, and the resulting performance improvements.",

keywords = "AlMn, Multichroic, Polarimeter, SiN, Transition-edge sensor",

author = "Duff, {S. M.} and J. Austermann and Beall, {J. A.} and D. Becker and R. Datta and Gallardo, {P. A.} and Henderson, {S. W.} and Hilton, {G. C.} and Ho, {S. P.} and J. Hubmayr and Koopman, {B. J.} and D. Li and J. McMahon and F. Nati and Niemack, {M. D.} and Pappas, {C. G.} and M. Salatino and Schmitt, {B. L.} and Simon, {S. M.} and Staggs, {S. T.} and Stevens, {J. R.} and {Van Lanen}, J. and Vavagiakis, {E. M.} and Ward, {J. T.} and Wollack, {E. J.}",

note = "Publisher Copyright: {\textcopyright} 2016, Springer Science+Business Media New York (outside the USA).",

year = "2016",

month = aug,

day = "1",

doi = "10.1007/s10909-016-1576-y",

language = "English (US)",

volume = "184",

pages = "634--641",

journal = "Journal of Low Temperature Physics",

issn = "0022-2291",

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Duff, SM, Austermann, J, Beall, JA, Becker, D, Datta, R, Gallardo, PA, Henderson, SW, Hilton, GC, Ho, SP, Hubmayr, J, Koopman, BJ, Li, D, McMahon, J, Nati, F, Niemack, MD, Pappas, CG, Salatino, M, Schmitt, BL, Simon, SM, Staggs, ST, Stevens, JR, Van Lanen, J, Vavagiakis, EM, Ward, JT & Wollack, EJ 2016, 'Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers', Journal of Low Temperature Physics, vol. 184, no. 3-4, pp. 634-641. https://doi.org/10.1007/s10909-016-1576-y

TY - JOUR

T1 - Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

AU - Duff, S. M.

AU - Austermann, J.

AU - Beall, J. A.

AU - Becker, D.

AU - Datta, R.

AU - Gallardo, P. A.

AU - Henderson, S. W.

AU - Hilton, G. C.

AU - Ho, S. P.

AU - Hubmayr, J.

AU - Koopman, B. J.

AU - Li, D.

AU - McMahon, J.

AU - Nati, F.

AU - Niemack, M. D.

AU - Pappas, C. G.

AU - Salatino, M.

AU - Schmitt, B. L.

AU - Simon, S. M.

AU - Staggs, S. T.

AU - Stevens, J. R.

AU - Van Lanen, J.

AU - Vavagiakis, E. M.

AU - Ward, J. T.

AU - Wollack, E. J.

PY - 2016/8/1

Y1 - 2016/8/1

N2 - Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiNx) materials and microwave structures, and the resulting performance improvements.

AB - Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiNx) materials and microwave structures, and the resulting performance improvements.

KW - AlMn

KW - Multichroic

KW - Polarimeter

KW - SiN

KW - Transition-edge sensor

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UR - http://www.scopus.com/inward/citedby.url?scp=84961822607&partnerID=8YFLogxK

U2 - 10.1007/s10909-016-1576-y

DO - 10.1007/s10909-016-1576-y

M3 - Article

AN - SCOPUS:84961822607

SN - 0022-2291

VL - 184

SP - 634

EP - 641

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

IS - 3-4

ER -

Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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