Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

S. M. Duff, J. Austermann, J. A. Beall, D. Becker, R. Datta, P. A. Gallardo, S. W. Henderson, G. C. Hilton, S. P. Ho, J. Hubmayr, B. J. Koopman, D. Li, J. McMahon, F. Nati, M. D. Niemack, C. G. Pappas, M. Salatino, B. L. Schmitt, S. M. Simon, S. T. StaggsJ. R. Stevens, J. Van Lanen, E. M. Vavagiakis, J. T. Ward, E. J. Wollack

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiNx) materials and microwave structures, and the resulting performance improvements.

Original languageEnglish (US)
Pages (from-to)634-641
Number of pages8
JournalJournal of Low Temperature Physics
Volume184
Issue number3-4
DOIs
StatePublished - Aug 1 2016

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

Keywords

  • AlMn
  • Multichroic
  • Polarimeter
  • SiN
  • Transition-edge sensor

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