Ab initio derived kinetic Monte Carlo model ofsdesorption from Si(100)-2×1

Michelle R. Radeke, Emily A. Carter

Research output: Contribution to journalArticle

34 Scopus citations

Abstract

Using an ab initio derived kinetic Monte Carlo model, we show that within the framework of a mechanism involving the systematic conversion of monohydrides to dihydrides and the prepairing assumption, (Formula presented) desorption from Si(100)-2×1 via isolated dihydrides follows first-order kinetics. Our model predicts that the kinetic order is invariant with respect to coverage, temperature, and surface features (e.g., steps and defects). However, we show that the concentration of defects on the surface has a profound effect on the desorption rate constant. The dependence of the rate constant on surface quality might explain the wide range of experimental values reported for the desorption rate constant.

Original languageEnglish (US)
Pages (from-to)4649-4658
Number of pages10
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume55
Issue number7
DOIs
StatePublished - Jan 1 1997
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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