Skip to main navigation Skip to search Skip to main content

Ab initio-derived dynamics for F2 reactions with partially fluorinated Si(100) surfaces: Translational activation as a possible etching tool

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Ab initio-derived dynamics for F2 reactions with partially fluorinated Si(100) surfaces: Translational activation as a possible etching tool'. Together they form a unique fingerprint.
Sort by

Chemistry

Material Science

Keyphrases