A wavelength detector using monolithically integrated subwavelength metal-semiconductor-metal photodetectors

Erli Chen; Stephen Y. Chou

doi:10.1117/12.264254

A wavelength detector using monolithically integrated subwavelength metal-semiconductor-metal photodetectors

Erli Chen, Stephen Y. Chou

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

A novel wavelength detector with a large spectral response range has been realized by monolithically integrating two metal-semiconductor-metal photodetectors that have finger spacings less than the wavelength of the incident light. The operating principle of the detector is based on the one-to- one correspondence between the photocurrent ratio of the photodetectors and the wavelength of the incident light, caused by the resonance effect of the photodetectors' subwavelength-spaced fingers. The experiment shows that the device has a wavelength resolution of 5 nm in the spectral range of 450-800 nm.

Original language	English (US)
Pages (from-to)	61-67
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3006
DOIs	https://doi.org/10.1117/12.264254
State	Published - 1997
Externally published	Yes
Event	Optoelectronic Integrated Circuits - San Jose, CA, United States Duration: Feb 12 1997 → Feb 12 1997

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

Automatic wavelength calibration
Metal-semiconductor- metal photodetectors
Wavelength detector

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10.1117/12.264254

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title = "A wavelength detector using monolithically integrated subwavelength metal-semiconductor-metal photodetectors",

abstract = "A novel wavelength detector with a large spectral response range has been realized by monolithically integrating two metal-semiconductor-metal photodetectors that have finger spacings less than the wavelength of the incident light. The operating principle of the detector is based on the one-to- one correspondence between the photocurrent ratio of the photodetectors and the wavelength of the incident light, caused by the resonance effect of the photodetectors' subwavelength-spaced fingers. The experiment shows that the device has a wavelength resolution of 5 nm in the spectral range of 450-800 nm.",

keywords = "Automatic wavelength calibration, Metal-semiconductor- metal photodetectors, Wavelength detector",

author = "Erli Chen and Chou, {Stephen Y.}",

year = "1997",

doi = "10.1117/12.264254",

language = "English (US)",

volume = "3006",

pages = "61--67",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Optoelectronic Integrated Circuits ; Conference date: 12-02-1997 Through 12-02-1997",

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T1 - A wavelength detector using monolithically integrated subwavelength metal-semiconductor-metal photodetectors

AU - Chen, Erli

AU - Chou, Stephen Y.

PY - 1997

Y1 - 1997

N2 - A novel wavelength detector with a large spectral response range has been realized by monolithically integrating two metal-semiconductor-metal photodetectors that have finger spacings less than the wavelength of the incident light. The operating principle of the detector is based on the one-to- one correspondence between the photocurrent ratio of the photodetectors and the wavelength of the incident light, caused by the resonance effect of the photodetectors' subwavelength-spaced fingers. The experiment shows that the device has a wavelength resolution of 5 nm in the spectral range of 450-800 nm.

AB - A novel wavelength detector with a large spectral response range has been realized by monolithically integrating two metal-semiconductor-metal photodetectors that have finger spacings less than the wavelength of the incident light. The operating principle of the detector is based on the one-to- one correspondence between the photocurrent ratio of the photodetectors and the wavelength of the incident light, caused by the resonance effect of the photodetectors' subwavelength-spaced fingers. The experiment shows that the device has a wavelength resolution of 5 nm in the spectral range of 450-800 nm.

KW - Automatic wavelength calibration

KW - Metal-semiconductor- metal photodetectors

KW - Wavelength detector

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DO - 10.1117/12.264254

M3 - Conference article

AN - SCOPUS:58749102398

SN - 0277-786X

VL - 3006

SP - 61

EP - 67

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optoelectronic Integrated Circuits

Y2 - 12 February 1997 through 12 February 1997

ER -

A wavelength detector using monolithically integrated subwavelength metal-semiconductor-metal photodetectors

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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