A wavelength detector using monolithically integrated subwavelength metal-semiconductor-metal photodetectors

Erli Chen, Stephen Y. Chou

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

A novel wavelength detector with a large spectral response range has been realized by monolithically integrating two metal-semiconductor-metal photodetectors that have finger spacings less than the wavelength of the incident light. The operating principle of the detector is based on the one-to- one correspondence between the photocurrent ratio of the photodetectors and the wavelength of the incident light, caused by the resonance effect of the photodetectors' subwavelength-spaced fingers. The experiment shows that the device has a wavelength resolution of 5 nm in the spectral range of 450-800 nm.

Original languageEnglish (US)
Pages (from-to)61-67
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3006
DOIs
StatePublished - 1997
Externally publishedYes
EventOptoelectronic Integrated Circuits - San Jose, CA, United States
Duration: Feb 12 1997Feb 12 1997

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Automatic wavelength calibration
  • Metal-semiconductor- metal photodetectors
  • Wavelength detector

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