A two-dimensional, axisymmetric model of a bounded, partially ionized, magnetized glow discharge plasma has been developed. The model treats positive ions as particles and electrons as a fluid in a hybrid configuration. The results reported are directed towards simulating an electron cyclotron resonance (ECR), microwave-sustained plasma. Microwave power profiles in the plasma are assumed, and the resulting electron and ion transport in the applied magnetic and self-consistent electrostatic field is calculated. Sheaths under typical operating conditions are very thin and the authors apply an analytic sheath model to avoid integration in the sheaths. Typical results are presented for a common ECR reactor geometry and conditions, and comparisons with experimental data are made when possible.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics