A System Based on Capacitive Interfacing of CMOS With Post-Processed Thin-Film MEMS Resonators Employing Synchronous Readout for Parasitic Nulling

Liechao Huang, Warren Rieutort-Louis, Alexandra Gualdino, Laura Teagno, Yingzhe Hu, João Mouro, Josue Sanz-Robinson, James C. Sturm, Sigurd Wagner, Virginia Chu, João Pedro Conde, Naveen Verma

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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Material Science

Engineering