A System Based on Capacitive Interfacing of CMOS With Post-Processed Thin-Film MEMS Resonators Employing Synchronous Readout for Parasitic Nulling

Liechao Huang, Warren Rieutort-Louis, Alexandra Gualdino, Laura Teagno, Yingzhe Hu, João Mouro, Josue Sanz-Robinson, James C. Sturm, Sigurd Wagner, Virginia Chu, João Pedro Conde, Naveen Verma

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint Dive into the research topics of 'A System Based on Capacitive Interfacing of CMOS With Post-Processed Thin-Film MEMS Resonators Employing Synchronous Readout for Parasitic Nulling'. Together they form a unique fingerprint.

Engineering & Materials Science