A source of hyperthermal neutrals for materials processing

M. J. Goeckner, T. K. Bennett, S. A. Cohen

Research output: Contribution to journalArticle

35 Scopus citations

Abstract

In this letter, we describe a unique method of producing hyperthermal neutrals for material processing. The hyperthermal neutrals are produced by accelerating ions across a sheath from a plasma onto a surface. On impact, the ions are neutralized and reflected with ∼ 50% of their incident energy. These neutrals then bounce off of additional surfaces prior to impacting the target. This unique multiple bounce system was developed for the following reasons: to reduce contamination from sputtered surface material, improve beam uniformity, and reduce UV radiation in the beam path. As a test of this method, we built a prototype beam source and used it to ash photoresist at rates up to 0.022 μm/min. These rates are consistent with a predicted neutral beam flux, 2 × 1014 cm-2 s-1. In addition, a simple model is used to indicate that this method is capable of producing economically acceptable ash rates. Comparisons with other neutral-beam production methods are made.

Original languageEnglish (US)
Pages (from-to)980-982
Number of pages3
JournalApplied Physics Letters
Volume71
Issue number7
DOIs
StatePublished - Aug 18 1997

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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