Abstract
Design, construction and characterization of low thermal mass hot stage for scanning probe microscopy (SPM) was discussed. The hot stage has a heater and a thermometer on a single 10×10×0.5 mm silicon chip. It was found that the chips provides spring contact electrodes an external temperature controller.
Original language | English (US) |
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Pages (from-to) | 1390-1392 |
Number of pages | 3 |
Journal | Review of Scientific Instruments |
Volume | 74 |
Issue number | 3 I |
DOIs | |
State | Published - Mar 2003 |
All Science Journal Classification (ASJC) codes
- Instrumentation