A Novel Objective for EUV Microscopy and EUV Lithography

Manfred Bitter (Inventor), Kenneth Hill (Inventor), Philip Efthimion (Inventor)

Research output: Innovation

Original languageEnglish
StatePublished - Jan 13 2014

Keywords

  • MEMS
  • Opto-Electronics/ELE ENG
  • computers/software

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  • Cite this

    Bitter, M., Hill, K., & Efthimion, P. (2014). A Novel Objective for EUV Microscopy and EUV Lithography.