A novel method for direct TEM study of microstructure of polysilicon films crystallized with and without underlying oxide

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	1210-1211
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	8
Issue number	SUPPL. 2
State	Published - Nov 20 2002

All Science Journal Classification (ASJC) codes

@article{787328d893704e6caa942d1ae09904dc,

title = "A novel method for direct TEM study of microstructure of polysilicon films crystallized with and without underlying oxide",

author = "Bo, {Xiang Zheng} and Nan Yao and James Sturm",

year = "2002",

month = nov,

day = "20",

language = "English (US)",

volume = "8",

pages = "1210--1211",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Cambridge University Press",

number = "SUPPL. 2",

}

TY - JOUR

T1 - A novel method for direct TEM study of microstructure of polysilicon films crystallized with and without underlying oxide

AU - Bo, Xiang Zheng

AU - Yao, Nan

AU - Sturm, James

PY - 2002/11/20

Y1 - 2002/11/20

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M3 - Article

AN - SCOPUS:0036409253

SN - 1431-9276

VL - 8

SP - 1210

EP - 1211

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -