A novel method for direct TEM study of microstructure of polysilicon films crystallized with and without underlying oxide

Xiang Zheng Bo, Nan Yao, James Sturm

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)1210-1211
Number of pages2
JournalMicroscopy and Microanalysis
Volume8
Issue numberSUPPL. 2
StatePublished - Nov 20 2002

All Science Journal Classification (ASJC) codes

  • Instrumentation

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